| Vol. 3, No. 1, August 2006- Art. 1 |
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| More than Moore: micro-machined products enable new applications
and open new markets |
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by
Benedetto Vigna (STMicroelectronics)
Copyright
Copyright © IEEE, 2005. Reprinted from More than Moore:
micro-machined products enable new applications and open new
markets, by Benedetto Vigna, Proceedings of IEDM 2005 |
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Abstract
Moore’s Law and its mapping into the International Technology
Roadmap of Semiconductors have been the most powerful drivers of
the development of the microelectronic industry.
In the same silicon manufacturing facilities, Micro-Electro-Mechanical
Systems have made their appearance, but, unlike CMOS, MEMS’
development doesn’t need to follow the lithography scaling
law for technical and economical reasons. Micro-machined products
are penetrating automotive, industrial, medical, and, lately, consumer
applications. However, this is only the beginning. Future wireless
sensor networks, domestic robots, smart pills, and Labs-On-Chips
will benefit tremendously from the next generation of tiny, inexpensive,
and low power-consumption MEMS devices. |
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