SOCOT is a Consortium, established under the terms of the 6th Framework
Program and sponsored by the European Commission (EC). The Consortium
comprises four members namely: KLA-TENCOR
(Israel), IMEC (Belgium),
QWED (Poland) and
STMicroelectronics (Italy). Its purpose is to determine a complete solution
for overlay measurements for 45nm generation ULSI devices and below, having
as a primary benchmark for its major characteristics the requirements
reported in the ITRS
roadmap tables.
In accordance with the EC contract, all public material related to
the SOCOT Partners project should be published in a dedicated non-protected
website, to ensure that the project is adequately promoted.
Public material related to the SOCOT project includes:
- Description of SOCOT Partner Companies (including biographies of
Work Package Leaders)
- SOCOT Project Summary
- Final Technical Report
The first two above mentioned documents can be downloaded from this
webpage while the last document will be available on this site only once
the project has been finalized.
According to the EC contract, the project officially started on October,
1st 2005 and it will be finalized on September, 30th 2008.
Welcome to the SOCOT project webpage and enjoy your reading!
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